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Tetramethyl orthosilicate RJ-TMOS
Description

Chemical nameTetramethyl orthosilicate 

Cas No.: 681-84-5 

Molecular Formula: C4H12O4Si 

Chemical structure: 

TMOS is a colorless clear liquid, soluble in most organic solvents, reacts with water. RJ-TMOS (electronic grade) is designed for electronic application with high purity, lower cation content, lower chlorine content.

Technical Index
Property Specification
Physical form Colorless Clear liquid
Odor Slight irritating smell
Boiling point, °C122±1℃
Specific Gravity at 25°C 1.02-1.04
Purity, % Min 99.5
Total cation content <1ppm
Total chlorine content <0.5ppm
Refractive index, 25°C,g/ml 1.028±0.01


Application
This product can be used in variety of applications, including:
Tetramethyl orthosilicate RJ-TMOS (electronic grade) can be used in variety of applications:
  • It can be used as chlorine-free or ultra-low chlorine heat-resistant material.
  • It can be used as an intermediate in sol-gel reactions.
  • It can be used in the semiconductor industry to produce high quality grinding particles.
  • It can be used in the preparation of semiconductor CVD processes.